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Pura Plus In-Line Trace Moisture Event
Sensor |
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The new Pura Plus is Michell
Instruments' response to latest changes in the wafer fabrication industry
requirements for device size and specification. The Pura Plus is an on-line
trace moisture event sensor designed for UHP inert gas applications in
semiconductor fabs to allow installation at multiple locations at the final
point of entry to the process tool. In the complex distribution system of a fab,
involving many branches, joints and points of use, moisture ingress often takes
place downstream of the conventional moisture monitoring point through small
leaks, insufficient system design, component failure or via a procedural
failure. Installed in the distribution system the Pura Plus provides rapid
indication (less than 1 minute) of a moisture event as small as 20 ppb at 1 ppb
baseline.
Product Features
- Rapid response to ppb level moisture events
- Low ppb sensitivity (<1 ppb)
- Innovative concept for multiple measurement point
installations
- Low maintenance
- Traffic light status indicator
- Programmable warning and alarm setpoints
- Modbus network compatible
- Multi-channel software for remote interface PC
- Ultra-high purity (UHP) gas line specification
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Technical Specification |
| Response Speed |
<1 minute for a 20 ppb moisture
event in 1 ppb base |
| Moisture Range |
1 ppb to 20,000 ppm |
| Pressure Range |
0 to 10 Barg absolute |
| Pressure Rating |
300 Barg absolute |
| Leak Tested To |
0-9 mbar l/sec-¹ |
| Operating Flow Range |
1 to 10 l/min-¹ |
| Operating Temperature |
5 to 40°C |
| Storage Temperature |
30 to 70°C |
| Power Supply |
20 to 28 V DC |
| Power Consumption |
5 W max |
| Fuse Rating for any External Fuse |
500 mA Quickblow |
| Data Output |
Modbus ASCII on 2-wire RS-485 |
| Warning and Alarm Outputs |
2 open-collector transistors |
| Maximum Voltage |
40 VDC |
| Maximum Current |
100 mA |
| MATERIALS EXPOSED TO
GAS |
| Housing Material |
Stainless Steel AISI316L VAE,
electropolished <10 Ra surface finish |
| Sensor Construction |
Aluminium oxide dielectric, gold upper
plate, aluminium lower plate |
| Internal Volume |
4.4cm-³ |
| Weight |
450 g |
| Gas Connections |
1/4" male VCR |
| Electrical Connections |
9-pin D-type male connector |
| Electro-Magnetic Compatibility |
EN50081-2 and EN50082-2 |
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Applications |
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