Pura

 Pure Gas Dew-Point Transmitter / On-Line
In many high purity gas applications, such as found in the semiconductor industry, the lowest residual moisture content of a gas is critical to maintaining a high yield operation. Historically, trace moisture measurement has been problematic, demanding the use of complex moisture analyzers or expensive analytical techniques. Now Michell has a simple, economical and very effective solution for on-line measurement of dew-point temperatures down to -180°F (equivalent to less than 1 part per billion). The Pura transmitter incorporates Michell's experience and expertise in the production and calibration of impedance dew- point sensors. Incorporation of industry standard materials and manufacturing processes gives the first low cost transmitter suitable for large-scale integration into a semiconductor fabrication facility or any other high purity gas application.

Product Features

  • Measurement range down to -180°F dew point (1ppbV)
  • Stable and repeatable measurement
  • High integrity sampling system
  • Analog and digital output
  • Simple installation
  • VCR process connections.
  • Optional display/alarm unit
  • Compact design
  • Fast response
Pura

Technical Specification

SENSOR
Sensor Type Michell Ceramic Moisture Sensor
Range -180 to -40°F dew point (calibrated from -150 to -40°F)
Accuracy ±1.8°F from ±-40 to -75°F
±3.6°F from -76 to - 150°F
±7.2°F from -151 to -180°F (estimated)
Resolution 0.18°F from -40 to -112°F
1.8°F from -113 to -150°F
1.8 to 5.4°F from -150 to -180°F
Operating Pressure Minimum 10-9 torr; Maximum 3500 p.s.i.g.
Operating Temperature 40 to +140°F
Flow Rate 0 - 10 SCFH
ELECTRONICS
Power Supply Nominal 24 VDC, 10-28 VDC maximum current 25 mA three-wire configuration
Output 4-20mA output adjustable from 1.8 to 180 °F span using interface software (supplied)
Max load (Ω) = 100 + 50 x (V supply - 8)
Output Error Status 23 mA = sensor fault
20 mA = over range
4 mA = under range (as supplied)
These settings are adjustable using interface software (supplied)
Cable Standard 6.5 feet (4000 feet max)
MECHANICAL
Sensor Block Cold drawn stainless steel, 0.1 - 0.2 Ra µm electro-polished internal finish
Connections ¼" male VCR gas connections
½" male VCR PURA Sensor connection
Installation Profile 4.72" across gas port face seals
Zero clearance required
2 X M4 X 0.7, 0.3" deep mounting holes in block, diagonally opposed
Overall Dimensions 4.72"W X 1.38"D X 5.91"H
Weight 1.2 lbs
Packaging Double bagged and sealed in UHP inert gas shipped individually in custom foam protection inside carton over sensor for transportation and handling
Measurement Units °F, °C dew point; ppmV with user-selectable range and resolution
Secondary Input Pressure via external transducer range to 0-4350 p.s.i.a. (by customer) input completely user configurable for any industry standard transducer
Automatic compensation for concentration units of measure
Power Supply Universal 85 to 265 VAC; 95 to 370 VDC
Enclosure Rating NEMA 12
NEMA 4X (front panel only with optional cover)
Operating Temperature -32 to +122°F
Relays 2 each 10 A@240 V or 8 A 24 VDC
Non-inductive load form C fully user configurable for measured value or sensor fault functions.
Outputs Analog: 4-20 mA fully user configurable and scaleable
Digital: RS232 - provides 2-way communication - full data access to user and total availability of all set-up

OPTIONS:
Power Supply 18 to 36 VAC; 9 to 60 VDC
Relays Up to 2 additional 5 A relays (max 4 in total) n/o type fully user configurable for measured value or sensor fault functions
Outputs Analog: 0-10 V fully user configurable and scaleable for range
Digital: RS485 - provides 2-way communication - full data access to user and total availability of all set-up options

Applications

Semi-Conductor / Electronics

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