Pura

 Pure Gas Dew-Point Transmitter / On-Line
In many high purity gas applications, such as found in the semiconductor industry, the lowest residual moisture content of a gas is critical to maintaining a high yield operation. Historically, trace moisture measurement has been problematic, demanding the use of complex moisture analyzers or expensive analytical techniques. Now Michell has a simple, economical and very effective solution for on-line measurement of dew-point temperatures down to -180°F (equivalent to less than 1 part per billion). The Pura transmitter incorporates Michell's experience and expertise in the production and calibration of impedance dew- point sensors. Incorporation of industry standard materials and manufacturing processes gives the first low cost transmitter suitable for large-scale integration into a semiconductor fabrication facility or any other high purity gas application.

Product Features

  • Measurement range down to -120°C (-184°F) dew point (1ppbV)
  • Stable and repeatable measurement
  • High integrity sampling system
  • Analog and digital output
  • Simple installation
  • VCR process connections.
  • Optional display/alarm unit
  • Compact design
  • Fast response
Pura

Technical Specification

Sensor
Sensor Type Michell Ceramic Moisture Sensor
Range -120 to -40°C (-184 to -40°F) dew point (calibrated from -100 to -40°C /-148 to -40°F)
Accuracy ±1°C from -40 to -60°C
(±1.8°F from -40 to -76°F)
±2°C from -60 to -100°C
(±3.6°F from -76 to - 148°F)
±4°C from -100 to -120°C (estimated)
(±7.2°F from -148 to -184°F (estimated))
Resolution 0.1°C from -40 to -79.9°C (0.18°F from -40 to -111.8°F); 1°C from -80 to -100°C (1.8°F from -112 to -148°F); 1 to 3°C from -100 to -120°C (1.8 to 5.4°F from -150 to -184°F)
Operating Pressure Minimum 10-9 torr; Maximum 240 barg (3480 psig)
Operating Temperature -40 to +60°F (-40 to +140°F)
Flow Rate (1 to 5 Nlmin-1 (2.1-10.5 SCFH)
Electronics/Electrical
Power Nominal 24 VDC, 10-28 VDC maximum current 25 mA three-wire configuration
Output 4-20mA output adjustable from 1 to 80°C (1.8 to 184°F) span using interface software (supplied) Max load (Ω) = 100 + 50 x (Vsupply - 8)
Output Error Status 23 mA = sensor fault
20 mA = over range
4 mA = under range (as supplied)
These settings are adjustable using interface software (supplied)
Cable Standard 2m (6.5 feet) (1200m /3937 feet max)
Mechanical
Sensor Block Cold drawn stainless steel, 0.1 - 0.2 Ra µm electro-polished internal finish
Connections ¼" male VCR gas connections
½" male VCR PURA Sensor connection
Installation Profile 120mm (4.72") across gas port face seals. Zero clearance required. 2 X M4 X 0.7, 7mm (0.3") deep mounting holes in block, diagonally opposed
Overall Dimensions Premium and OEM verisons: 120 x 35 x 150mm (WxDxH) 4.72" x 1.38" x 5.91" Pura Sensor version: 132 x ∅35mm (5.2 x ∅1.4")
Weight Premium and OEM versions: 450g (0.99 lb) Pura Sensor version: 180 g (6.3 oz)
Packaging Double bagged and sealed in UHP inert gas shipped individually in custom foam protection inside carton over sensor for transportation and handling.
Monitor
Measurement Units °F, °C dew point; ppmV with user-selectable range and resolution
Secondary Input Pressure via external transducer range to 0-30 MPa (0-4350 psig) input completely user confi gurable for any industry standard transducer. Automatic compensation for concentration units of measure.
Power Supply Universal 85 to 265 VAC; 95 to 370 VDC
Enclosure Rating NEMA 12
NEMA 4X (front panel only with optional cover)
Operating Temperature -20 to +50°C (-4 to +122°F)
Relays 2 each 10 A@240 V or 8 A 24 VDC
Non-inductive load form C fully user configurable for measured value or sensor fault functions.
Outputs Analog: 4-20 mA fully user configurable and scaleable
Digital: RS232 - provides 2-way communication - full data access to user and total availability of all set-up

Options:
Power Supply 18 to 36 VAC; 9 to 60 VDC
Relays Up to 2 additional 5 A relays (max 4 in total) n/o type fully user configurable for measured value or sensor fault functions
Outputs Analog: 0-10 V fully user configurable and scaleable for range
Digital: RS485 - provides 2-way communication - full data access to user and total availability of all set-up options

Applications

Semi-Conductor / Electronics

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