Pura

 Pure Gas Moisture Transmitter
In many high purity gas applications, such as the semiconductor industry, the residual moisture content of the gas is critical to the satisfactory operation of a process.

Historically trace moisture measurement has been problematic, demanding the use of complex moisture analysers or expensive analytical techniques. Now Michell has brought to market a simple, economical and very effective solution for on-line measurement of dew-point temperatures down to -120°C (equivalent to less than 1 part per billion).

The Pura transmitter benefi ts from Michell’s experience and expertise in the production and calibration of impedance dew-point sensors. Incorporation of industry standard materials and manufacturing processes gives the first low cost transmitter suitable for large-scale integration into a semiconductor fabrication plant or high purity gas line.



Caractéristiques produits

  • Measurement Range down to -120°Cdp (1 ppbV)
  • Stable and repeatable measurement
  • High integrity sampling system
  • Analogue and digital output
  • Simple installation
  • VCR process connections
  • Compact design
  • Optional display / alarm unit
  • Fast response
Pura

Spécifications techniques
Sensor
Sensor Type Michell Advanced Ceramic Moisture Sensor
Range -120 to -40°Cdp (calibrated from -100 to -40°C )
Accuracy ±1°C from -40 to -60°C
±2°C from -60 to -100°C
±4°C from -100 to -120°C (estimated)
Resolution 0.1°C from -40 to -79.9°C
1°C from -80 to -100°C
1 to 3°C from -100 to -120°C
Operating Pressure Minimum 10-9 torr
Maximum 24 MPa (240 barg)
Operating Temperature -40 to +60°C
Flow Rate 1 to 5 Nl/min
Electronics/Electrical
Power Nominal 24 V DC, 10-28 V DC maximum current 25 mA three- or two-wire configuration
Output 4-20 mA output adjustable from 1 to 80°C span using interface software (supplied)
Max load (Ω) = 100 + 50 x (V supply - 8)
Output Error Status 23 mA = sensor fault;
20 mA = over range;
4 mA = under range (as supplied)
These settings are adjustable using interface software (supplied)
Cable Standard 2m (1200m max)
Mechanical
Sensor Block Cold drawn stainless steel, 0.1-0.2 Ra µm electro-polished internal finish
Connections Premium and OEM versions: ¼" male VCR connections
Pura Sensor version: ½" male VCR connection
Installation Profile Premium and OEM versions: 120.00mm pitch, drop in across gas port face seals. Zero pipe clearance required. 2 off M4 x 0.7, 7mm deep mounting holes in block, diagonally opposed at 20 x 20mm pitch Pura Sensor version: fits into user's ½"" VCR configured port
Overall Dimensions Premium and OEM versions: 120 x 35 x 150mm (w x d x h) Pura Sensor version: 132 x ø35mm
Weight Premium and OEM versions: 450g
Pura Sensor version: 180g
Packaging Pura: Double bagged and sealed in UHP inert gas
Pura OEM and Pura Sensor: Single bagged in 1000 gauge polythene
All options: shipped individually in profiled sponge protection and carton
Sensor version supplied with protective guard over sensor surface for transportation and handling
Monitor
Measurement Units °F, °Cdp; ppmV and ppbV with user-selectable range and resolution
Secondary Measurement
Variable		 Pressure via external transducer 0-30 MPa (300 variable barg). Completely user-configurable for any industry standard transducer.
Automatic compensation for ppmV and ppbV
Power Supply Universal 85 to 265 V AC; 95 to 370 V DC
Ingress Protection IP54 (NEMA 12); IP66 (NEMA 4X) for front panel only with optional cover
Operating Temperature -20 to +50°C
Relays 2 off 10 A/240 V c/o fully user configurable:
can accommodate full range for selected engineering unit + sensor fault alarm functions
Outputs
   Analogue0-10 V fully user configurable and scaleable for range
   DigitalRS485: provides 2-way communication - full data access to user and total availability of all set-up and configuration
Options
Power Supply 18 to 36 V AC; 9 to 60 V DC
Relays 1 or 2 further 5 A relays (max 4 in total)
n/o type fully user-configurable: can accommodate full range + full unit choice + sensor fault alarm functions
Outputs
   Analogue0-10 V fully user configurable and scaleable for range
   DigitalRS485: provides 2-way communication - full data access to user and total availability of all set-up and configuration

Applications
Semi-Conductor / Electronics

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